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Press to see a step-by-step fundamental Chemical Vapor Deposition process

Vaporization and Transport of Precursor Molecules into Reactor

Diffusion of Precursor Molecules to Surface

Adsorption of Precursor Molecules to Surface

Decomposition of Precursor Molecules on Surface and Incorporation into Solid Films

Recombination of Molecular Byproducts and Desorption into Gas Phase

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E-mail:  htchiu@chiuserv.ac.nctu.edu.tw