General System Requirements

•         gas and vapor delivery lines
•         reactor main chamber - hot wall, cold wall
•         materials of construction / geometry
•         substrate loading and unloading assembly
•         energy source(s) - RF and radiant heating, plasma, photo irradiation
•         vacuum systems - LPCVD
•         exhaust system - byproducts removal
•         process control and measurement gauges
gas flow rate, pressure, temperature, deposition time
•         safety equipments!!!
hazardous vapor phase reactants and products are frequently encountered
ventilation, sensors, alarms are needed for protection

Examples of CVD Reactors

Commercial CVD system suppliers

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