Chemical Vapor Deposition is chemical reactions which transform gaseous molecules , called precursor, into a solid material , in the form of thin film or powder, on the surface of a substrate .

The process is widely used to fabricate semiconductor devices.

=> What is Deposition

=> Chemical Vapor Deposition Essentials

=> Fundamental Reaction Steps of Chemical Vapor Deposition

=> Applications of Chemical Vapor Deposition

=> Other Sites Related to Chemical Vapor Deposition

including  CVD System and Parts Suppliers and Journals

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E-mail: htchiu@chiuserv.ac.nctu.edu.tw