Chemical Vapor
Deposition Gas Products
In CVD processes, volatile byproducts are
always formed. These products are often neglected because they are considered
useless. However, the analyses of these products can lead researchers to
know more about CVD reaction mechanisms. Consequently,
to design better CVD systems.
Frequently, the volatile products generated in CVD
processes are hazardous (poisonous, flammable, corrosive ...). Careful
treatments are needed before they are allowed to enter the environment.
Last Updated August 14, 1998