Thermal Energy

• resistive heating - tube furnace
• quartz tungsten halogen lamp (very good heat source) - radiant heating
• radio-frequency - inductive heating
• laser as thermal energy source

Photo Energy

• UV-visible light
• laser as photo energy source

Glow Discharge-Plasma

---

| Home of Hsin-Tien Chiu | Home of CVD | CVD Essentials | Fundamental CVD Steps | CVD Applications |

E-mail: htchiu@chiuserv.ac.nctu.edu.tw