C
hemical
V
apor
D
eposition - Step
4
Decomposition of Precursor and Incorporation into Solid Films
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Hsin-Tien Chiu
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Inorganic Thin Film Lab
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E-mail:
htchiu@cc.nctu.edu.tw
or
htchiu@chiuserv.ac.nctu.edu.tw
Last Updated February 9, 1996
